Rapid annealing and the anomalous diffusion of ion implanted boron into silicon
- Alwin E. Michel
- W. Rausch
- et al.
- 1987
- Applied Physics Letters
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23 results for Werner Rausch
Implantation damage and the anomalous transient diffusion of ion-implanted boron
- Alwin E. Michel
- W. Rausch
- et al.
- 1987
- Applied Physics Letters
Uniformity characterization of an RTP system
- Jeffrey C. Gelpey
- Paul O. Stump
- et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B