Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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5 results for Dongfei Pei

Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- - Hiroyuki Miyazoe
  - Sebastian U. Engelmann
  - et al.
- 2017
- JVSTA
Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low- k dielectrics
- - Weiyi Li
  - Dongfei Pei
  - et al.
- 2017
- JVSTA
Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films
- - Weiyi Li
  - Dongfei Pei
  - et al.
- 2016
- Applied Physics Letters
Measurement of bandgap energies in low-k organosilicates
- - M.T. Nichols
  - Weiyi Li
  - et al.
- 2014
- Journal of Applied Physics
Dielectric damage
- - H. Ren
  - S. Banna
  - et al.
- 2014
- ECS Transactions