Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- Hiroyuki Miyazoe
- Sebastian U. Engelmann
- et al.
- 2017
- JVSTA
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5 results for Dongfei Pei
Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low- k dielectrics
- Weiyi Li
- Dongfei Pei
- et al.
- 2017
- JVSTA
Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films
- Weiyi Li
- Dongfei Pei
- et al.
- 2016
- Applied Physics Letters
Measurement of bandgap energies in low-k organosilicates
- M.T. Nichols
- Weiyi Li
- et al.
- 2014
- Journal of Applied Physics
Dielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions