Measurements of carrier transport in MOSFETs with bottom-up nanowire channel as a function of the nanowire diameter
- G.M. Cohen
- S. Bangsaruntip
- et al.
- 2008
- DRC 2008
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Characterization of new aromatic polymers for 157 nm photoresist applications
- N. Fender
- P.J. Brock
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering