A comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
- J. Bucchignano
- G.B. Stephenson
- et al.
- 1995
- Journal of Materials Research
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97 results for Katherine Saenger
Identification of a mobility-limiting scattering mechanism in modulation-doped Si/SiGe heterostructures
- K. Ismail
- F. Legoues
- et al.
- 1994
- Physical Review Letters
Study of C49-TiSi2 and C54-TiSi2 formation on doped polycrystalline silicon using in situ resistance measurements during annealing
- L. Clevenger
- R. Mann
- et al.
- 1994
- Journal of Applied Physics
Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity
- Christopher J. Morath
- Humphrey J. Maris
- et al.
- 1994
- Journal of Applied Physics
Modulation-doped n-type Si/SiGe with inverted interface
- K. Ismail
- J.O. Chu
- et al.
- 1994
- Applied Physics Letters
Thickness‐direction thermal expansion of polyimide films
- Ho-Ming Tong
- K.L. Saenger
- et al.
- 1993
- Polymer Engineering & Science
Pulsed laser deposition of diamond-like carbon films
- David L. Pappas
- Katherine L. Saenger
- et al.
- 1992
- Journal of Applied Physics
Characterization of laser vaporization plasmas generated for the deposition of diamond-like carbon
- David L. Pappas
- Katherine L. Saenger
- et al.
- 1992
- Journal of Applied Physics
Pulsed laser deposition of high-epsilon dielectrics: PMN and PMN-PT
- K.L. Saenger
- R.A. Roy
- et al.
- 1992
- MRS Proceedings 1992
Wavelength-modulated interferometric thermometry for improved substrate temperature measurement
- K.L. Saenger
- F. Tong
- et al.
- 1992
- Review of Scientific Instruments