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Scott D. Halle- Henry Kamberian
- Jed Rankin
- et al.
- 2024
- SPIE Photomask Technology + EUV Lithography 2024
- Scott D. Halle
- Derren N. Dunn
- et al.
- 2022
- JM3
- Martin Burkhardt
- Zheng Chen
- et al.
- 2022
- OEN 2022
- Sagarika Mukesh
- Jack Wong
- et al.
- 2022
- SPIE Advanced Lithography 2022
- Scott D. Halle
- Max O. Bloomfield
- et al.
- 2020
- SPIE Advanced Lithography 2020
- 2017
- IEEE Trans Semicond Manuf
- Anuja De Silva
- Indira Seshadri
- et al.
- 2016
- JVSTB
- Nobuhiro Okai
- Erin Lavigne
- et al.
- 2016
- J. Micro/Nanolithogr. MEMS MOEMS
- 2016
- SPIE Advanced Lithography 2016
