Hydrogen induced tunnel emission in Pt/(BaxSr1-x)Ti1+yO3+z/Pt thin film capacitors
- J.D. Baniecki
- R.B. Laibowitz
- et al.
- 2001
- Journal of Applied Physics
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33 results for C. Parks
Low temperature hydrogen induced degradation of (Ba,Sr)TiO3 thin film capacitors
- J.D. Baniecki
- C. Parks
- et al.
- 1999
- MRS Proceedings 1999
A study of CClF3/H2 reactive ion etching damage and contamination effects in silicon
- X.C. Mu
- S.J. Fonash
- et al.
- 1986
- Journal of Applied Physics