Development of TiO2 containing hardmasks through plasma-enhanced atomic layer deposition
- Anuja De Silva
- Indira Seshadri
- et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
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Betavoltaic performance of radiation-hardened high-efficiency Si space solar cells
- Ruqiang Bao
- Peter J. Brand
- et al.
- 2012
- IEEE T-ED