Publications

2 results for Frank Zhu

Gas cluster ion beam assisted NiPt germano-silicide formation on SiGe
- - Ahmet S. Ozcan
  - Christian Lavoie
  - et al.
- 2016
- Journal of Applied Physics
Challenges of nickel silicidation in CMOS technologies
- - Nicolas Breil
  - Christian Lavoie
  - et al.
- 2015
- Microelectronic Engineering