Direct determination of photoresist composition changes during UV exposure
- Frances A. Houle
- Vaughn R. Deline
- et al.
- 2006
- SPIE Advanced Lithography 2006
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71 results for Vaughn R. Deline
Liquid immersion lithography - Evaluation of resist issues
- William Hinsberg
- Gregory Wallraff
- et al.
- 2004
- Microlithography 2004
RAPID THERMAL ANNEALING OF Zn**6**4 AND Mg**2**4 IMPLANTS IN GaAs.
- S. Tiwari
- J.C. DeLuca
- et al.
- 1984
- Gallium Arsenide and Related Compounds 1984
DIFFUSION OF ION-IMPLANTED BORON AND PHOSPHORUS DURING RAPID THERMAL ANNEALING OF SILICON.
- G.S. Oehrlein
- R. Ghez
- et al.
- 1984
- ICDS 1984
ENHANCED DIFFUSION IN SHORT TIME ANNEALED ARSENIC AND BORON ION IMPLANTED SILICON.
- T.O. Sedgwick
- S. Cohen
- et al.
- 1983
- ECS Meeting 1983
RAPID ANNEALING OF SILICON.
- R.T. Hodgson
- V.R. Deline
- et al.
- 1983
- MRS Proceedings 1983
ENHANCED DIFFUSION IN SHORT TIME ANNEALED ARSENIC AND BORON ION IMPLANTED SILICON.
- T.O. Sedgwick
- S. Cohen
- et al.
- 1983
- VLSI Science and Technology 1983
A study on the long-term degradation of crystalline silicon solar cells metallized with Cu electroplating
- Qiang Huang
- Kathleen B. Reuter
- et al.
- 2015
- ECS J. Solid State Sci. Technol.
Homogeneous surface oxidation of organosilicates by controlled combustion of adsorbed fuels: A facile method for low-temperature processing
- Bob E. Feller
- Vaughn R. Deline
- et al.
- 2013
- ACS AMI
Enhanced grain growth of electroplated copper on cobalt-containing seed layer
- Q. Huang
- B.C. Baker-O'Neal
- et al.
- 2013
- JES