Aggressively scaled (0.143 μm 2) 6T-SRAM cell for the 32 nm node and beyondD. FriedJ. Hergenrotheret al.2004IEDM 2004
Thermally robust dual-work function ALD-MN x MOSFETs using conventional CMOS process flowD.-G. ParkZ. Luoet al.2004VLSI Technology 2004
Metal-gate FinFET and fully-depleted SOI devices using total gate silicidationJakub KedzierskiEdward Nowaket al.2002IEDM 2002