Access transistor design and optimization for 65/45nm high performance SOI eDRAMG. WangP. Parrieset al.2008VLSI-TSA 2008
(110) Channel, SiON gate-dielectric PMOS with record high Ion=1 mA/μm through channel stress and source drain external resistance (R ext) engineeringB. YangA. Waiteet al.2007IEDM 2007
Optimization of silicon technology for the IBM System z9Daniel J. PoindexterScott R. Stiffleret al.2007IBM J. Res. Dev
High performance 45-nm SOI technology with enhanced strain, porous low-k BEOL, and immersion lithographyS. NarasimhaK. Onishiet al.2006IEDM 2006
High performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cellE. LeobandungH. Nayakamaet al.2005VLSI Technology 2005
High performance 65 nm SOI technology with enhanced transistor strain and advanced-low-K BEOLW.-H. LeeA. Waiteet al.2005IEDM 2005
Dual stress liner enhancement in hybrid orientation technologyC. SherawM. Yanget al.2005VLSI Technology 2005
Dual stress liner for high performance sub-45nm gate length SOI CMOS manufacturingH.S. YangR. Maliket al.2004IEDM 2004
A high performance 90 nm SOI technology with 0.992 μm2 6T-SRAM cellMukesh KhareS. Kuet al.2002IEDM 2002