Real-time models of electrostatically actuated cantilever probes with integrated thermal sensor for nanoscale interrogation
- Pranav Agarwal
- Deepak R. Sahoo
- et al.
- 2010
- JMEMS
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.