Evaluation of ALE processes for patterning
- J. M. Papalia
- Nathan Marchack
- et al.
- 2016
- SPIE Advanced Lithography 2016
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33 results for Nathan Marchack
Plasma processing for advanced microelectronics beyond CMOS
- Nathan Marchack
- L. Buzi
- et al.
- 2021
- Journal of Applied Physics
Ultrahigh-Q on-chip silicon-germanium microresonators
- Ryan Schilling
- Chi Xiong
- et al.
- 2022
- Optica
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
- L. Buzi
- Hiroyuki Miyazoe
- et al.
- 2020
- JVSTA
Control of surface oxide formation in plasma-enhanced quasiatomic layer etching of tantalum nitride
- Nathan Marchack
- Jon L. Innocent-Dolor
- et al.
- 2020
- JVSTA
Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: A physics and chemistry perspective
- Kenji Ishikawa
- Tatsuo Ishijima
- et al.
- 2019
- Japanese Journal of Applied Physics
Utilizing surface modification in plasma-enhanced cyclic etching of tantalum nitride to surpass lithographic limits
- Nathan Marchack
- Keith Hernandez
- et al.
- 2019
- Plasma Processes and Polymers
Nitride etching with hydrofluorocarbons III: Comparison of C4H9F and CH3F for low-k′ nitride spacer etch processes
- Hiroyuki Miyazoe
- Nathan Marchack
- et al.
- 2018
- JVSTB
Nitride etching with hydrofluorocarbons. II. Evaluation of C4H9F for tight pitch Si3N4 patterning applications
- Nathan Marchack
- Hiroyuki Miyazoe
- et al.
- 2018
- JVSTB
Scalable Nanostructured Carbon Electrode Arrays for Enhanced Dopamine Detection
- Silvia Demuru
- Luca Nela
- et al.
- 2018
- ACS Sensors