Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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33 results for Nathan Marchack

Evaluation of ALE processes for patterning
- - J. M. Papalia
  - Nathan Marchack
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Plasma processing for advanced microelectronics beyond CMOS
- - Nathan Marchack
  - L. Buzi
  - et al.
- 2021
- Journal of Applied Physics
Ultrahigh-Q on-chip silicon-germanium microresonators
- - Ryan Schilling
  - Chi Xiong
  - et al.
- 2022
- Optica
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
- - L. Buzi
  - Hiroyuki Miyazoe
  - et al.
- 2020
- JVSTA
Control of surface oxide formation in plasma-enhanced quasiatomic layer etching of tantalum nitride
- - Nathan Marchack
  - Jon L. Innocent-Dolor
  - et al.
- 2020
- JVSTA
Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: A physics and chemistry perspective
- - Kenji Ishikawa
  - Tatsuo Ishijima
  - et al.
- 2019
- Japanese Journal of Applied Physics
Utilizing surface modification in plasma-enhanced cyclic etching of tantalum nitride to surpass lithographic limits
- - Nathan Marchack
  - Keith Hernandez
  - et al.
- 2019
- Plasma Processes and Polymers
Nitride etching with hydrofluorocarbons III: Comparison of C₄H₉F and CH₃F for low-k′ nitride spacer etch processes
- - Hiroyuki Miyazoe
  - Nathan Marchack
  - et al.
- 2018
- JVSTB
Nitride etching with hydrofluorocarbons. II. Evaluation of C₄H₉F for tight pitch Si₃N₄ patterning applications
- - Nathan Marchack
  - Hiroyuki Miyazoe
  - et al.
- 2018
- JVSTB
Scalable Nanostructured Carbon Electrode Arrays for Enhanced Dopamine Detection
- - Silvia Demuru
  - Luca Nela
  - et al.
- 2018
- ACS Sensors