Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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33 results for Nathan Marchack

Cyclic Cl₂/H₂ quasi-atomic layer etching approach for TiN and TaN patterning using organic masks
- - Nathan Marchack
  - J. M. Papalia
  - et al.
- 2017
- JVSTA
In-situ etch rate study of Hf_xLa_yO_z in Cl₂/BCl₃ plasmas using the quartz crystal microbalance
- - Nathan Marchack
  - Taeseung Kim
  - et al.
- 2015
- JVSTA
Feature profile evolution during shallow trench isolation etching in chlorine-based plasmas. III. the effect of oxygen addition
- - Cheng-Che Hsu
  - Nathan Marchack
  - et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures