Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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16 results for Shanti Pancharatnam

Self-Allancd Gate Contact (SAGC) for CMOS technology scaling beyond 7nm
- - Ruilong Xie
  - Chanro Park
  - et al.
- 2019
- VLSI Technology 2019
Effect of chamber surface coat on TiN film growth
- - Shanti Pancharatnam
  - J. Wynne
  - et al.
- 2019
- ASMC 2019
Study of titanium nitride underlayer properties and its influence on tungsten growth
- - Shanti Pancharatnam
  - J. Wynne
  - et al.
- 2018
- ASMC 2018
Tungsten and cobalt metallization: A material study for MOL local interconnects
- - Vimal Kamineni
  - Mark Raymond
  - et al.
- 2016
- IITC/AMC 2016
Process Co-Optimization of CVD and CMP for Tungsten Metallization
- - Shanti Pancharatnam
  - Wei Tsu Tseng
  - et al.
- 2020
- ECS J. Solid State Sci. Technol.
Study of TiN and TaN underlayer properties and their influence on W growth
- - Shanti Pancharatnam
  - Gabriel Rodriguez
  - et al.
- 2019
- IEEE Trans Semicond Manuf