Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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15 results for J. Frougier

Improved Air Spacer Co-Integrated with Self-Aligned Contact (SAC) and Contact over Active Gate (COAG) for Highly Scaled CMOS Technology
- - Kangguo Cheng
  - Chanro Park
  - et al.
- 2020
- VLSI Technology 2020
Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET
- - N. Loubet
  - T.B. Hook
  - et al.
- 2017
- VLSI Technology 2017
Review of nanosheet metrology opportunities for technology readiness
- - Mary A. Breton
  - Daniel Schmidt
  - et al.
- 2022
- JM3
Spectral interferometry for fully integrated device metrology
- - Daniel Schmidt
  - Manasa Medikonda
  - et al.
- 2023
- JM3
Improved Air Spacer for Highly Scaled CMOS Technology
- - Kangguo Cheng
  - Chanro Park
  - et al.
- 2020
- IEEE Transactions on Electron Devices