Single-step deep reactive ion etch of silicon for through-via applications with alternative gas mixtures
- Richa Agrawal
- Nathan Marchack
- et al.
- 2025
- Journal of Vacuum Science and Technology A Vacuum Surfaces and Films
Publications
82 results for Marinus Hopstaken
Inhibitor-Free Area-Selective Deposition of Titanium Nitride
- Damon B. Farmer
- Marinus Hopstaken
- et al.
- 2025
- Chemistry of Materials
Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- Juliano Borges
- Hongwen Yan
- et al.
- 2024
- SPIE Advanced Lithography 2024
Disorder-Induced Magnetotransport Anomalies in Amorphous and Textured Co1- xSix Semimetal Thin Films
- Alan Molinari
- Federico Balduini
- et al.
- 2023
- ACS Applied Electronic Materials
Characterization of TSV etch from a sustainability standpoint
- Osakpolo Isowamwen
- Nathan Marchack
- et al.
- 2023
- SPIE Advanced Lithography 2023
New Phase-Change Materials by Atomic-Level Engineering the Dopants for Extremely Low VthDrift at 85 °C and High Endurance 3D Crosspoint Memory : IBM/Macronix PCRAM Joint Project
- Huai-Yu Cheng
- A. Grun
- et al.
- 2022
- IEDM 2022
Study of surface interactions for encapsulation of phase change memory materials
- L. Buzi
- D. Koty
- et al.
- 2022
- SPIE Advanced Lithography 2022
Process-Induced ReRAM Performance Improvement of Atomic Layer Deposited HfO2 for Analog In-Memory Computing Applications
- Steven Consiglio
- H. Higuchi
- et al.
- 2021
- IMCS 2021
Atomic Layer Deposition of Tungsten Oxide Using Nitrogen Dioxide: A Comparative Study with Other Oxygen Sources
- Damon B. Farmer
- Matthew Copel
- et al.
- 2021
- Chemistry of Materials
Investigating microwave loss of SiGe using superconducting transmon qubits
- Martin Sandberg
- Vivekananda P. Adiga
- et al.
- 2021
- Applied Physics Letters