Novel Materials and Processes in Replacement Metal Gate for Advanced CMOS Technology
- Ruqiang Bao
- Steven Hung
- et al.
- 2018
- IEDM 2018
Publications
82 results for Marinus Hopstaken
Annealing and impurity effects in co thin films for MOL Contact and BEOL metallization
- James Kelly
- Vimal Kamineni
- et al.
- 2018
- JES
Patching of Lattice Defects in Two-Dimensional Diffusion Barriers
- Damon B. Farmer
- Priscilla D. Antunez
- et al.
- 2018
- ACS Applied Nano Materials
Electron mobility in thin In0.53Ga0.47As channel
- Eduard Cartier
- Amlan Majumdar
- et al.
- 2017
- ESSDERC 2017
Experimental study of PVD Cu/CVD Co bilayer dissolution for BEOL Cu interconnect applications
- X. Sun
- B. Peethala
- et al.
- 2017
- ECS Meeting 2017
Analysis of loss mechanisms in Ag2ZnSnSe4 Schottky barrier photovoltaics
- Talia S. Gershon
- Oki Gunawan
- et al.
- 2017
- Journal of Applied Physics
Unexpected impact of RIE gases on lithographic films
- Martin Glodde
- Robert L. Bruce
- et al.
- 2017
- SPIE Advanced Lithography 2017
Effects of the incorporation of alkali elements on Cu(In,Ga)Se2 thin film solar cells
- Donghyeop Shin
- Jekyung Kim
- et al.
- 2016
- Sol Energ Mater Sol Cells
Process optimizations for NBTI/PBTI for future replacement metal gate technologies
- Barry P. Linder
- A. Dasgupta
- et al.
- 2016
- IRPS 2016
Improvement of hydrogen detection limit for quadruple SIMS tool
- Z. Zhang
- B. Hengstebeck
- et al.
- 2016
- ASMC 2016