The effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
Publications
Date
Featured collections
Popular topics
5 results for M.T. Nichols
Measurement of bandgap energies in low-k organosilicates
- M.T. Nichols
- Weiyi Li
- et al.
- 2014
- Journal of Applied Physics
Dielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions
The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials
- M.T. Nichols
- K. Mavrakakis
- et al.
- 2013
- Journal of Applied Physics
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics