The effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
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9 results for G.A. Antonelli
X-ray scattering methods for porosity metrology of low-k thin films
- C.M. Settens
- V.K. Kamineni
- et al.
- 2009
- FCMN 2009
Spectroscopic ellipsometry of porous low-κ dielectric thin films
- V.K. Kamineni
- C.M. Settens
- et al.
- 2009
- FCMN 2009
A study of the vibrational modes of a nanostructure with picosecond ultrasonics
- G.Andrew Antonelli
- Humphrey J. Maris
- et al.
- 2002
- Physica B: Condensed Matter
Measurement of bandgap energies in low-k organosilicates
- M.T. Nichols
- Weiyi Li
- et al.
- 2014
- Journal of Applied Physics
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics
Synergistic combinations of dielectrics and metallization process technology to achieve 22 nm interconnect performance targets
- G.A. Antonelli
- G. Jiang
- et al.
- 2012
- Microelectronic Engineering
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation
- H. Sinha
- D.B. Straight
- et al.
- 2010
- JVSTA
Picosecond ultrasonics study of the vibrational modes of a nanostructure
- G. Andrew Antonelli
- Humphrey J. Maris
- et al.
- 2002
- Journal of Applied Physics