Wafer scale tilt-compensated silicon nanowire atomic force microscopy probes for high aspect ratio geometries
- Brian A. Bryce
- B. Robert Ilic
- et al.
- 2014
- JMM
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.