High resolution patterning of positive resist for semi-additive process
- Elizabeth A. Duch
- Minhua Lu
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Publications
Date
Featured collections
Popular topics
20 results for Elizabeth A. Duch
Advancements in Throughput, Lifetime, Purification, and Workflow for Integrated Nanoscale Deterministic Lateral Displacement
- Benjamin Wunsch
- Kuan Yu Hsieh
- et al.
- 2021
- Advanced Materials Technologies
Gel-on-a-chip: Continuous, velocity-dependent DNA separation using nanoscale lateral displacement
- Benjamin Wunsch
- Sung-Cheol Kim
- et al.
- 2019
- Lab on a Chip
Trace-Gas Spectroscopy of Methane Using a Monolithically Integrated Silicon Photonic Chip Sensor
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- CLEO 2019
Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy
- Eric J. Zhang
- Yves Martin
- et al.
- 2019
- SPIE DCS 2019
Silicon Photonic Gas Sensing
- William M. J. Green
- Eric J. Zhang
- et al.
- 2019
- OFC 2019
Integrated nanoscale deterministic lateral displacement arrays for separation of extracellular vesicles from clinically-relevant volumes of biological samples
- Joshua T. Smith
- Benjamin Wunsch
- et al.
- 2018
- Lab on a Chip
Hydrodynamics of diamond-shaped gradient nanopillar arrays for effective DNA translocation into nanochannels
- Chao Wang
- Robert L. Bruce
- et al.
- 2015
- ACS Nano
Clog-free translocation of long DNA in nanofluidic pillar arrays and 30 nm wide channels: A fabrication and hydrodynamic study
- Chao Wang
- Robert L. Bruce
- et al.
- 2014
- MicroTAS 2014
CMOS-Compatible self-aligned In0.53Ga0.47As MOSFETs with gate lengths down to 30 nm
- Amlan Majumdar
- Yanning Sun
- et al.
- 2014
- IEEE T-ED