Patterned electrochemical deposition of copper using an electron beam
- Mark Den Heijer
- Ingrid Shao
- et al.
- 2014
- APL Materials
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17 results for Ingrid Shao
Optimization of Cu damascene electrodeposition process in ULSI for yield and reliability improvement
- Ingrid Shao
- T. Cheng
- et al.
- 2013
- ECS Transactions
Mechanism study of Ag catalyzed directional etch of silicon for nanowire formation
- Ingrid Shao
- Lynne Gignac
- 2011
- ECS Meeting 2011
Stress in electrodeposited CoFe alloy films
- Ingrid Shao
- Lubomyr T. Romankiw
- et al.
- 2010
- Journal of Crystal Growth
Stress in electrodeposited high moment CoFe films
- I. Shao
- L. Romankiw
- et al.
- 2009
- ECS Meeting 2009
ALD approach toward electrodeposition of Sb2Te3 for phase-change memory applications
- V. Venkatasamy
- I. Shao
- et al.
- 2008
- JES
Deposition and characterization of Fe0.55 Co0.45 nanowires
- I. Shao
- M.W. Chen
- et al.
- 2007
- JES
Novel approach to reduce source/drain series and contact resistance in high-performance UTSOI CMOS devices using selective electrodeless CoWP or CoB process
- James Pan
- Anna Topol
- et al.
- 2007
- IEEE Electron Device Letters
An alternative low resistance MOL technology with electroplated rhodium as contact plugs for 32nm CMOS and beyond
- I. Shao
- J.M. Cotte
- et al.
- 2007
- IITC 2007
Pulse plating effect on stress of CoFe electrodeposits
- I. Shao
- C. Bonhôte
- et al.
- 2004
- ECS Meeting 2004