Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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113 results for Michel Despont

Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
- - M. Despont
  - H. Takahashi
  - et al.
- 2000
- MEMS 2000
VLSI-NEMS chip for AFM data storage
- - M. Despont
  - J. Brugger
  - et al.
- 1999
- MEMS 1999
Nanomechanical nose
- - H.P. Lang
  - M.K. Baller
  - et al.
- 1999
- MEMS 1999
High-yield wafer chuck for single-sided wet etching of MEMS structures
- - J. Brugger
  - G. Beljakovic
  - et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- - M. Despont
  - H. Lorenz
  - et al.
- 1997
- MEMS 1997
A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
- - H.P. Lang
  - R. Berger
  - et al.
- 1998
- Applied Physics A: Materials Science and Processing
Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
- - L. Dellmann
  - S. Roth
  - et al.
- 1998
- Microsystem Technologies
Fabrication of photoplastic high-aspect ratio microparts and micromolds usina SU-8 UV resist
- - H. Lorenz
  - M. Despont
  - et al.
- 1998
- Microsystem Technologies
Wide bandwidth room-temperature THz imaging array based on antenna-coupled MOSFET bolometer
- - Thomas Morf
  - Bernhard Klein
  - et al.
- 2014
- Sensors and Actuators, A: Physical
Thermal probe maskless lithography for 27.5 nm half-pitch Si technology
- - Lin Lee Cheong
  - Philip Paul
  - et al.
- 2013
- Nano Letters