Ultrathin high-K gate stacks for advanced CMOS devices
- E. Gusev
- D.A. Buchanan
- et al.
- 2001
- Technical Digest - International Electron Devices Meeting
Publications
53 results for Ken Rim
80 nm poly-silicon gated n-FETs with ultra-thin Al2O3 gate dielectric for ULSI applications
- D.A. Buchanan
- E. Gusev
- et al.
- 2000
- IEDM 2000
Fabrication and analysis of deep submicron strained-Si N-MOSFET's
- Kern Rim
- Judy L. Hoyt
- et al.
- 2000
- IEEE Transactions on Electron Devices