The Micro to Nano Addressing Block (MNAB)
- K. Gopalakrishnan
- R.S. Shenoy
- et al.
- 2005
- IEDM 2005
Publications
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66 results for Martha I. Sanchez
Chemistry controlling nanoscale pattern formation by deep UV photolithography
- F.A. Houle
- W.D. Hinsberg
- et al.
- 1999
- ACS Spring 1999
Nanofoam porosity measured by infrared spectroscopy and refractive index
- M.I. Sanchez
- J.L. Hedrick
- et al.
- 1996
- MRS Spring Meeting 1996
Polyimide nanofoams for low dielectric applications
- K.R. Carter
- H.J. Cha
- et al.
- 1995
- MRS Spring Meeting 1995
Base-catalyzed photosensitive polyimide
- D.R. McKean
- G.M. Wallraff
- et al.
- 1991
- ACS Spring 1991
Base-catalyzed cyclization of ortho-aromatic amide-alkyl esters: a novel approach to chemical imidization
- W. Volksen
- T. Pascal
- et al.
- 1991
- ACS Spring 1991
An analysis of EUV resist stochastic printing failures
- Martha I. Sanchez
- Gregory M. Wallraff
- et al.
- 2019
- EUVL 2019
DSA patterning options for logics and memory applications
- Chi Chun Liu
- Elliott Franke
- et al.
- 2017
- SPIE Advanced Lithography 2017
Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle
- Cheng Chi
- Chi Chun Liu
- et al.
- 2017
- SPIE Advanced Lithography 2017
DSA via hole shrink for advanced node applications
- Cheng Chi
- Chi Chun Liu
- et al.
- 2016
- SPIE Advanced Lithography 2016