Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Alex Joseph Varghese

Vertical-Transport Nanosheet Technology for CMOS Scaling beyond Lateral-Transport Devices
- - H. Jagannathan
  - B. Anderson
  - et al.
- 2021
- IEDM 2021
A holistic characterization methodology for stochastic printing failures in EUV contact holes
- - Jennifer Church
  - Brad Austin
  - et al.
- 2021
- ASMC 2021
Missing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique
- - Graham Jensen
  - Vidyasagar Anantha
  - et al.
- 2021
- ASMC 2021
Gas cluster ion beam processing for improved self aligned contact yield at 7 nm node FinFET: MJ: MOL and junction interfaces
- - Su Chen Fan
  - Sean Teehan
  - et al.
- 2018
- ASMC 2018