Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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55 results for Son Van Nguyen

Advanced bilayer low-k dielectric cap for reliable high performance Cu-low k interconnects
- - Griselda Bonilla
  - Lawrence A. Clevenger
  - et al.
- 2008
- ADMETA 2008
Optimized interfacial strength for dense and porous SiCOH
- - D.D. Restaino
  - Steve Molis
  - et al.
- 2007
- ADMETA 2007
Enhanced cracking resistance of plasma deposited low k SiCOH films with nano imbedded layers
- - Son Nguyen
  - Eric Liniger
  - et al.
- 2007
- ECS Meeting 2007
65nm Cu integration and interconnect reliability in low stress K=2.75 SiCOH
- - V. McGahay
  - G. Bonilla
  - et al.
- 2006
- IITC 2006
PECVD Low-k (∼2.7) dielectric SiCOH film development and integration for 65 nm CMOS devices
- - K. Ida
  - S. Nguyen
  - et al.
- 2005
- AMC 2005
BEOL process integration with Cu/SiCOH (k=2.8) low-k interconnects at 65nm groundrules
- - S. Lane
  - M. Fukasawa
  - et al.
- 2005
- AMC 2005
BEOL process integration with Cu/SiCOH (k=2.8) low-k interconnects at 65 nm groundrules
- - M. Fukasawa
  - S. Lane
  - et al.
- 2005
- IITC 2005
Low-k/copper integration scheme suitable for ULSI manufacturing from 90nm to 45nm nodes
- - T. Nogami
  - S. Lane
  - et al.
- 2005
- Optics East 2005
Lower-k SiCOH integration for 65 nm ground rules
- - T. Nogami
  - S. Lane
  - et al.
- 2005
- VMIC 2005
Reliability, yield, and performance of a 90 nm SOI/Cu/SiCOH technology
- - D. Edelstein
  - C.R. Davis
  - et al.
- 2004
- IITC 2004