Multiple implantation and multiple annealing of phosphorus doped germanium to achieve n-type activation near the theoretical limit
- Jeehwan Kim
- Stephen W. Bedell
- et al.
- 2012
- Applied Physics Letters
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.