Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result for Akira Wada

Highly selective silicon nitride etching to Si and SiO₂ for a gate sidewall spacer using a CF₃I/O₂/H₂ neutral beam
- - Daiki Nakayama
  - Akira Wada
  - et al.
- 2013
- Journal of Physics D: Applied Physics