High performance bulk planar 20nm CMOS technology for low power mobile applicationsHuiling ShangSameer Jainet al.2012VLSI Technology 2012
A cost effective 32nm high-K/metal gate CMOS technology for low power applications with single-metal/gate-first processX. ChenS. Samavedamet al.2008VLSI Technology 2008
Effect of plasma N2 and thermal NH3 nitridation in HfO2 for ultrathin equivalent oxide thicknessMin DaiYanfeng Wanget al.2013Journal of Applied Physics