Polysilanes: Photochemistry and deep UV lithography
- R.D. Miller
- G.M. Wallraff
- et al.
- 2004
- Polymer Engineering & Science
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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76 results for R. Sooriyakumaran
The synthesis of soluble, substituted silane high polymers by Wurtz coupling techniques
- R.D. Miller
- D. Thompson
- et al.
- 2003
- Journal of Polymer Science Part A: Polymer Chemistry
Alkoxy-Substituted Poly(diarylsilanes): Thermochromism and Solvatochromism
- R.D. Miller
- R. Sooriyakumaran
- 2002
- Macromolecules
Laser Desorption Mass Spectrometry of Polysilanes
- Thomas F. Magnera
- V. Balaji
- et al.
- 2002
- Macromolecules
Structural Study of Thermochromism in Poly(Di-n-alkylgermanes) by Raman Spectroscopy in the Visible and Near-Infrared
- V.M. Hallmark
- C.G. Zimba
- et al.
- 2002
- Macromolecules
Evolution of a 193 nm bilayer resist for manufacturing
- R.W. Kwong
- M. Khojasteh
- et al.
- 2002
- Proceedings of SPIE-The International Society for Optical Engineering
IBM 193nm bilayer resist: Materials, lithographic performance and optimization
- Ranee Kwong
- P. Rao Varanasi
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Silicon-containing resists for 157 nm applications
- Ratnam Sooriyakumaran
- Debra Fenzel-Alexander
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Transfer etching of bilayer resists in oxygen-based plasmas
- A. Mahorowala
- K. Babich
- et al.
- 2000
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Monomer reactivities and kinetics in radical copolymerization of hydroxystyrene derivatives and tert-butyl (meth)acrylate
- Hiroshi Ito
- Charlie Dalby
- et al.
- 2000
- Macromolecules