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James P. Doyle- S.E. Steen
- S.J. McNab
- et al.
- 2005
- Microlithography 2005
- J. Doyle
- P. Chaudhari
- et al.
- 2003
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
- K. Matsumoto
- K. Takeda
- et al.
- 2002
- Asia Display/IDW 2002
- P. Chaudhari
- James Lacey
- et al.
- 2001
- Nature
- J. Doyle
- M.K. Linnarsson
- et al.
- 1998
- Journal of Applied Physics
- 1998
- Journal of Applied Physics
- J. Doyle
- A.Yu. Kuznetsov
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
- Richard Lossy
- David L. Pappas
- et al.
- 1995
- Journal of Applied Physics