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Recent progress and challenges in enabling embedded Si:C technologyB. YangZ. Renet al.2008ECS Meeting 2008
On implementation of embedded Phosphorus-doped SiC stressors in SOI nMOSFETsZhibin RenG. Peiet al.2008VLSI Technology 2008
FinFET performance advantage at 22nm: An AC perspectiveM. GuillornJ. Changet al.2008VLSI Technology 2008
Extendibility of NiPt silicide to the 22-nm node CMOS technologyKazuya OhuchiChristian Lavoieet al.2008IWJT 2008
(110) Channel, SiON gate-dielectric PMOS with record high Ion=1 mA/μm through channel stress and source drain external resistance (R ext) engineeringB. YangA. Waiteet al.2007IEDM 2007
Extendibility of NiPt silicide contacts for CMOS technology demonstrated to the 22-nm nodeKazuya OhuchiChristian Lavoieet al.2007IEDM 2007