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S. Bukofsky- Huiling Shang
- Sameer Jain
- et al.
- 2012
- VLSI Technology 2012
- 2007
- SPIE Advanced Lithography 2007
- E. Leobandung
- H. Nayakama
- et al.
- 2005
- VLSI Technology 2005
- Lars Liebmann
- Arnold Barish
- et al.
- 2004
- AMM 2004
- Alan E. Rosenbluth
- Rama N. Singh
- et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
- Alan E. Rosenbluth
- Scott Bukofsky
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
- Scott Halle
- Alan Thomas
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering