Global optimization of masks, including film stack design to restore TM contrast in high NA TCC's
- Alan E. Rosenbluth
- David Melville
- et al.
- 2007
- SPIE Advanced Lithography 2007
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14 results for David Melville
Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- David O. S. Melville
- Alan E. Rosenbluth
- et al.
- 2011
- Journal of Vacuum Science and Technology B
Analysis and optimization of multilayer silver superlenses for near-field optical lithography
- David O.S. Melville
- Richard J. Blaikie
- 2007
- Physica B: Condensed Matter
Nanoscale optical patterning using evanescent fields and surface plasmons
- Richard J. Blaikie
- Maan M. Alkaisi
- et al.
- 2004
- International Journal of Nanoscience