Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results for David Melville

Global optimization of masks, including film stack design to restore TM contrast in high NA TCC's
- - Alan E. Rosenbluth
  - David Melville
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- - David O. S. Melville
  - Alan E. Rosenbluth
  - et al.
- 2011
- Journal of Vacuum Science and Technology B
Analysis and optimization of multilayer silver superlenses for near-field optical lithography
- - David O.S. Melville
  - Richard J. Blaikie
- 2007
- Physica B: Condensed Matter
Nanoscale optical patterning using evanescent fields and surface plasmons
- - Richard J. Blaikie
  - Maan M. Alkaisi
  - et al.
- 2004
- International Journal of Nanoscience