Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for Anthony Scaduto

64 nm pitch Cu dual-damascene interconnects using pitch split double exposure patterning scheme
- - Shyng-Tsong Chen
  - Hideyuki Tomizawa
  - et al.
- 2011
- IITC/MAM 2011
Qualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator
- - Gregory McIntyre
  - Daniel Corliss
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Fundamental investigation of Negative Tone Development (NTD) for the 22nm node (and beyond)
- - Guillaume Landie
  - Yongan Xu
  - et al.
- 2011
- SPIE Advanced Lithography 2011