Controlled Air Gap Formation between W and TiO2 Films via Sub-Surface TiO2 Atomic Layer Etching
- Hannah R. M. Margavio
- Jimmy Nguyen
- et al.
- 2025
- Advanced Materials Technologies
Publications
33 results for Noel Arellano
Inhibitor-Free Area-Selective Deposition of Titanium Nitride
- Damon B. Farmer
- Marinus Hopstaken
- et al.
- 2025
- Chemistry of Materials
Simultaneous Co-localized TiO2 Etching and W Atomic Layer Deposition Using WF6 as a Dual-Functional Reactant
- Hannah R. M. Margavio
- Noel Arellano
- et al.
- 2024
- Chemistry of Materials
Reactive Vapor-Phase Inhibitors for Area-Selective Depositions at Tunable Critical Dimensions
- Lawal Adewale Ogunfowora
- Ishwar Singh
- et al.
- 2024
- JACS
Area-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors
- Krystelle Lionti
- Noel Arellano
- et al.
- 2022
- Chemistry of Materials
Merged-Element Transmons: Design and Qubit Performance
- H.J. Mamin
- E. Huang
- et al.
- 2021
- Physical Review Applied
A three-dimensional micro-electrode array for in-vitro neuronal interfacing
- Andrea Spanu
- Nicolò Colistra
- et al.
- 2020
- Journal of Neural Engineering
Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches
- Wei Sun
- Jie Shen
- et al.
- 2020
- Science
Surface initiated polymer thin films for the area selective deposition and etching of metal oxides
- Thomas G. Pattison
- Alexander E. Hess
- et al.
- 2020
- ACS Nano
Extending the compositional diversity of films in area selective atomic layer deposition through chemical functionalities
- Magi Mettry
- Alexander E. Hess
- et al.
- 2019
- JVSTA