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Charles T. Rettner- G.W. Burr
- K. Virwani
- et al.
- 2013
- VLSI Technology 2013
- Gregory Sadasdf Doerk
- Joy Y. Cheng
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- 2013
- SPIE Advanced Lithography 2013
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- et al.
- 2013
- SPIE Advanced Lithography 2013
- G.W. Burr
- K. Virwani
- et al.
- 2012
- VLSI Technology 2012
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- Ratnam Sooriyakumaran
- et al.
- 2012
- SPIE Photomask Technology + EUV Lithography 2012
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- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- SPIE Advanced Lithography 2012
- 2012
- SPIE Advanced Lithography 2012
- R.S. Shenoy
- K. Gopalakrishnan
- et al.
- 2011
- VLSI Technology 2011
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2011
- SPIE Advanced Lithography 2011