Publications

93 results for Takashi Ando

Quasi-damascene metal gate/high-k CMOS using oxygenation through gate electrodes
- - Changhwan Choi
  - Takashi Ando
  - et al.
- 2009
- Microelectronic Engineering
High-performance high-κ/metal gates for 45nm CMOS and beyond with gate-first processing
- - M. Chudzik
  - B. Doris
  - et al.
- 2007
- VLSI Technology 2007
Materials and process integration issues in metal gate/high-k stacks and their dependence on device performance
- - A.C. Callegari
  - K. Babich
  - et al.
- 2007
- ECS Meeting 2007