Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
- K. De Keyser
- C. Van Bockstael
- et al.
- 2010
- Applied Physics Letters
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19 results for R.L. Van Meirhaeghe
Texture of cobalt germanides on Ge(100) and Ge(111) and its influence on the formation temperature
- K. De Keyser
- R.L. Van Meirhaeghe
- et al.
- 2010
- JES
In situ X-ray diffraction study of thin film Ir/Si solid state reactions
- W. Knaepen
- J. Demeulemeester
- et al.
- 2010
- Microelectronic Engineering
In situ study of the formation of silicide phases in amorphous Co-Si mixed layers
- C. Van Bockstael
- K. De Keyser
- et al.
- 2010
- Microelectronic Engineering
In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)
- W. Knaepen
- J. Demeulemeester
- et al.
- 2009
- JVSTA
In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers
- C. Van Bockstael
- C. Detavernier
- et al.
- 2009
- Journal of Applied Physics
In situ x-ray diffraction study of metal induced crystallization of amorphous germanium
- W. Knaepen
- S. Gaudet
- et al.
- 2009
- Journal of Applied Physics
Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films
- C. Van Bockstael
- K. De Keyser
- et al.
- 2009
- Applied Physics Letters
Formation and stability of NiSi in the presence of Co and Fe alloying elements
- D. Deduytsche
- C. Detavernier
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Effect of Pt addition on growth stress and thermal stress of NiSi films
- C. Van Bockstael
- K. De Keyser
- et al.
- 2008
- Journal of Applied Physics