Electrical characterization of FinFETs with fins formed by directed self assembly at 29 nm fin pitch using a self-aligned fin customization scheme
- Hsinyu Tsai
- Hiroyuki Miyazoe
- et al.
- 2014
- IEDM 2014
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56 results for Joy Y. Cheng
Enabling complex nanoscale pattern customization using directed self-assembly
- Gregory S. Doerk
- Joy Y. Cheng
- et al.
- 2014
- Nature Communications
Determination of the internal morphology of nanostructures patterned by directed self assembly
- Daniel F. Sunday
- Matthew R. Hammond
- et al.
- 2014
- ACS Nano
Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication
- Hsinyu Tsai
- Jed W. Pitera
- et al.
- 2014
- ACS Nano
Three-dimensional nanofabrication by block copolymer self-assembly
- Caroline A. Ross
- Karl K. Berggren
- et al.
- 2014
- Advanced Materials
Pattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- ACS Nano
Simple and versatile methods to integrate directed self-assembly with optical lithography using a polarity-switched photoresist
- Joy Y. Cheng
- Daniel P. Sanders
- et al.
- 2010
- ACS Nano
High-aspect-ratio cylindrical nanopore arrays and their use for templating titania nanoposts
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2008
- Advanced Materials
Templated self-assembly of block copolymers: Top-down helps bottom-up
- Joy Y. Cheng
- Caroline A. Ross
- et al.
- 2006
- Advanced Materials
Directed self-assembly of topcoat-free, integration-friendly high-χ block copolymers
- Eri Hirahara
- Margareta Paunescu
- et al.
- 2015
- SPIE Advanced Lithography 2015