Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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5 results for Chen Li

Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/C₄F₈ and Ar/CHF₃ plasma
- - Dominik Metzler
  - Chen Li
  - et al.
- 2016
- Journal of Chemical Physics
Selective atomic layer etching of HfO₂ over silicon by precursor and substrate-dependent selective deposition
- - Kang Yi Lin
  - Chen Li
  - et al.
- 2020
- JVSTA
Achieving ultrahigh etching selectivity of SiO₂ over Si₃N₄ and Si in atomic layer etching by exploiting chemistry of complex hydrofluorocarbon precursors
- - Kang Yi Lin
  - Chen Li
  - et al.
- 2018
- JVSTA
Fluorocarbon assisted atomic layer etching of SiO₂ and Si using cyclic Ar/C₄F₈ and Ar/CHF₃ plasma
- - Dominik Metzler
  - Chen Li
  - et al.
- 2016
- JVSTA
Application of cyclic fluorocarbon/argon discharges to device patterning
- - Dominik Metzler
  - Kishore Uppireddi
  - et al.
- 2016
- JVSTA