Efficient low pressure sputtering in a large inverted magnetron suitable for film synthesis
- W.D. Gill
- Eric Kay
- 2004
- Review of Scientific Instruments
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89 results for Eric Kay
Method for studying sputtered particles by emission spectroscopy
- Erich Sawatzky
- Eric Kay
- 2004
- Review of Scientific Instruments
Structural and magnetic properties of sputtered NiFe films grown in a dc discharge environment
- Eric Kay
- 2004
- Journal of Applied Physics
Gas incorporation into sputtered films
- Harold F. Winters
- Eric Kay
- 2004
- Journal of Applied Physics
Magnetic and structural properties of epitaxial and polycrystalline GdIG films prepared by rf sputtering
- E. Sawatzky
- E. Kay
- 2003
- Journal of Applied Physics
Preparation of garnet films by sputtering
- E. Sawatzky
- E. Kay
- 2003
- Journal of Applied Physics
Some magnetic and structural properties of epitaxial garnet films prepared by rf sputtering
- E. Sawatzky
- E. Kay
- 2003
- Journal of Applied Physics
Gas analysis in films by laser-induced flash evaporation followed by mass spectrometry
- Harold F. Winters
- Eric Kay
- 2003
- Journal of Applied Physics
Positive-ion bombardment of substrates in rf diode glow discharge sputtering
- J.W. Coburn
- Eric Kay
- 2003
- Journal of Applied Physics
Influence of surface absorption characteristics on reactively sputtered films grown in the biased and unbiased modes
- Harold F. Winters
- Eric Kay
- 2003
- Journal of Applied Physics