Organic conductors as electron beam resist materials
- Y. Tomkiewicz
- E.M. Engler
- et al.
- 1982
- Applied Physics Letters
Publications
Date
Featured collections
Popular topics
38 results for M. Hatzakis
1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- Warren D. Grobman
- Hans E. Luhn
- et al.
- 1979
- IEEE T-ED
Performance characteristics of diazo-type photoresists under e-beam and optical exposure
- Jane M. Shaw
- Michael Hatzakis
- 1978
- IEEE T-ED
Electron-beam fabrication of high-density amorphous bubble film devices
- K.Y. Ahn
- T.H.P. Chang
- et al.
- 1975
- IEEE Transactions on Magnetics
Fabrication and josephson properties of NB3GE
- R.B. Laibowitz
- C.C. Tsuei
- et al.
- 1975
- IEEE Transactions on Magnetics
Electron-Optical Masking of Semiconductor Structures
- Richard F. M. Thornley
- Michael Hatzakis
- et al.
- 1970
- IEEE T-ED
Batch-Fabricated Thin-Film Magnetic Recording Heads
- Lubomyr T. Romankiw
- Ian M. Croll
- et al.
- 1970
- IEEE Transactions on Magnetics
Electron Resists for Microcircuit and Mask Production
- M. Hatzakis
- 1969
- JES