Water immersion of model photoresists: Interfacial influences on water concentration and surface morphology
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2005
- Journal of Microlithography, Microfabrication and Microsystems
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.