Diagnostics of an r.f. sputtering glow discharge - correlation between atomic absorption and mass spectrometry
- E.W. Eckstein
- J.W. Coburn
- et al.
- 1975
- International Journal of Mass Spectrometry and Ion Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.