Thermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage
- G. Cross
- M. Despont
- et al.
- 2000
- MRS Proceedings 2000
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104 results for Peter Vettiger
The "Millipede" - More than one thousand tips for parallel and dense AFM data storage
- P. Vettiger
- G. Gross
- et al.
- 2000
- APMRC 2000
Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
- M. Despont
- H. Takahashi
- et al.
- 2000
- MEMS 2000
VLSI-NEMS chip for AFM data storage
- M. Despont
- J. Brugger
- et al.
- 1999
- MEMS 1999
Nanomechanical nose
- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1998
- MEMS 1998
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Willemin
- et al.
- 1997
- TRANSDUCERS 1997
High-yield wafer chuck for single-sided wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- M. Despont
- H. Lorenz
- et al.
- 1997
- MEMS 1997
Flip-chip, self-aligned, optoelectronic transceiver module
- K. Jackson
- E.B. Flint
- et al.
- 1992
- IEE/LEOS Summer Topical Meetings 1992