All-photoplastic, soft cantilever cassette probe for scanning force microscopy
- G. Genolet
- M. Despont
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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104 results for Peter Vettiger
A cantilever array-based artificial nose
- M.K. Baller
- H.P. Lang
- et al.
- 2000
- Ultramicroscopy
Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
- M. Despont
- H. Takahashi
- et al.
- 2000
- MEMS 2000
"Millipede" - An AFM data storage system at the frontier of nanotribology
- U. Dürig
- G. Cross
- et al.
- 2000
- Tribology Letters
Ion projection lithography for resistless patterning of thin magnetic films
- W. Bruenger
- M. Torkler
- et al.
- 2000
- Microelectronic Engineering
Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
- H. Rothuizen
- U. Drechsler
- et al.
- 2000
- Microelectronic Engineering
Parallel nanodevice fabrication using a combination of shadow mask and scanning probe methods
- Roli Lüthi
- Reto R. Schlittler
- et al.
- 1999
- Applied Physics Letters
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Ion-beam patterning of magnetic films using stencil masks
- B.D. Terris
- L. Folks
- et al.
- 1999
- Applied Physics Letters
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Despont
- et al.
- 1999
- Sensors and Actuators, A: Physical