Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives
- P. Mächtle
- R. Berger
- et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
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104 results for Peter Vettiger
Thermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage
- Graham L. W. Cross
- Michel Despont
- et al.
- 2001
- Materials Research Society Symposium-Proceedings
Highly parallel data storage system based on scanning probe arrays
- M.I. Lutwyche
- M. Despont
- et al.
- 2000
- Applied Physics Letters
Patterning magnetic films by ion beam irradiation
- B.D. Terris
- D. Weller
- et al.
- 2000
- Journal of Applied Physics
VLSI-NEMS chip for parallel AFM data storage
- M. Despont
- J. Brugger
- et al.
- 2000
- Sensors and Actuators, A: Physical
All-photoplastic, soft cantilever cassette probe for scanning force microscopy
- G. Genolet
- M. Despont
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A cantilever array-based artificial nose
- M.K. Baller
- H.P. Lang
- et al.
- 2000
- Ultramicroscopy
Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
- H. Rothuizen
- U. Drechsler
- et al.
- 2000
- Microelectronic Engineering
"Millipede" - An AFM data storage system at the frontier of nanotribology
- U. Dürig
- G. Cross
- et al.
- 2000
- Tribology Letters
Ion projection lithography for resistless patterning of thin magnetic films
- W. Bruenger
- M. Torkler
- et al.
- 2000
- Microelectronic Engineering